Our UV-LED light source upgrade for photomask and reticle inspection.

Photomask and reticle inspection systems usually combine advanced optics with a mono- or multispectral light source to identify defects or contamination of large photomasks. If you are looking for a powerful and flexible UV-LED solution to replace traditional mercury arc lamp technology in your inspection equipment, our fiber-coupled exposure systems (ALE/1) are the perfect solution.

Mono and Multi-wavelength Setups

While other UV-LED light sources solely provide a monospectral output (e.g., 385 nm), you get maximum flexibility with our UV-LED exposure systems, allowing you to compose a fully customized broadband spectral output.

You can go for an ALE/1.3 system with the classical i-, h-, and g-line peak wavelengths (365/405/435 nm) of a mercury arc lamp. Also, single- and dual-wavelength setups are available. The NUV spectral range may be complemented by any blue and green component, as our ALE/1 UV-LED light source can combine up to 5 individual emitters into one optical path.

Liquid Light Guides for Highest Integration Flexibility

Photomask inspection equipment may have to handle very large substrates. With our fiber-coupled solutions, you have no restrictions regarding movability or positioning the light source in your machine. Some existing installations use light guides of up to 20 m. Please see Primelite Performance Optics for additional information.

Superb Process Stability

Based on our closed-loop feedback control system, we can keep the radiation output constant – short-term and long-term. That means you have the highest accuracy and consistency between inspection results at the beginning and the end of an exposure cycle and also between individual exposure cycles.

Highlights – why ALE/1 for photomask inspection applications

  • Fibre-coupled UV-LED light source for extended flexibility
  • Stable, precise, consistent, high-intensity radiation output
  • Flexible, polychromatic coverage of i-, h-, and g-line (350-450 nm), no need for optical filters
  • Integration of additional wavelengths (Blue, Green, Red) possible
  • Long lifetime and TCO benefits of UV-LED technology
  • No mechanical shutter needed (fast switching times down to 1 millisecond)